WebIt can also be operated in manual mode. It can accommodate substrates ranging from 200mm to small pieces, with maximum thicknesses of 1.5mm. Automatic wafer handling … WebThe PAS 5500/350C is a Deep UV stepper for 0.15-µm applications and beyond. The high productivity and low cost of ownership allow capacity extensions in existing DUV stepper …
Asml PAS 5500 Manuals ManualsLib
WebMay 9, 2024 marks 30 years since the first-ever PAS 5500 platform was shipped. PAS 5500 shaped ASML’s market success and technology leadership – becoming our longest-lived … WebThe PAS 5500/400D i-line Step-and-Scan system has a variable-NA (0.48 to 0.65) 4x projection lens, which, combined with ASML’s AERIAL Illuminator, provides 280-nm resolution. ASML’s revolutionary Step-and-Scan stage technology enables users to take full advantage of the AERIAL illumination intensity and advanced i-line resists for … drberry maplehealthdpc.com
ASML Optics Lithography System PAS 5500/275D - GlobalSpec
WebThe PAS 5500/850C 248-nm Step-and-Scan system enables 110-nm mass production. Since the initial introduction of the PAS 5500/850, the PAS 5500/850 series have … WebMar 3, 2024 · The PAS 5500/8TFH-A uses the proven ultra-low aberration KrF lens from the XT platform on the PAS body, ensuring excellent performance and a low cost of ownership. The low thermal conductivity of AlTiC wafers means maximum throughput on the track is restricted, allowing the PAS 5500/8TFH-A more time for alignment and wafer stabilization. WebManuals and User Guides for ASML PAS 5500. We have 1 ASML PAS 5500 manual available for free PDF download: User Manual . ASML PAS 5500 User Manual (12 … dr. berryman missoula mt